High Voltage Power Supplies -- MEC series

Electrostatic Chuck Power Supplies - Reversible output module.

The MEC series is a reversible high voltage power supply developed especially for electrostatic chuck applications. Smooth wafer transmission is accomplished through the remote polarity change feature.  The reversible and source-and-sink current features assure the smooth release of the wafer. Its compact modular shape was designed with the OEM in mind.

Main Features:

• Specially designed for El-Chuck applications
• Smooth release of wafer with polarity reverse function
• Remote polarity change and output voltage control
• Output Voltage and Current monitor

Application:                                                                                                                       Data Sheet (PDF)

• Electrostatic Chuck (E-Chuck)

Voltage Range:  1kV to 10kV

Power:  10W