High Voltage Power Supplies -- EJC series

Electrostatic Chuck Power Supply - Fast response, bench-top.

The EJC series is a high voltage power supply developed especially for electrostatic chuck applications. Smooth wafer transmission and release is accomplished through the EJC's bipolar output and remote/local ON/OFF capabilities. A forced discharge function and stable HV output improve the operability of the E-chuck.

Main Features:

• Specially designed for E-Chuck applications
• Fast response (10 ms) with electronic polarity change
• Bi-polar output
• Integrated RF filter (optional)
• Long life and high reliability with no relay

Application:                                                                                                                        Data Sheet (PDF)

• Electrostatic Chuck (E-Chuck)

Voltage Range:  1kV to 5kV

Wattage Range:  6W to 30W