High Voltage Power Supplies -- EC series

Electrostatic Chuck Power Supplies - Dual output, rack mount.                           Data Sheet (PDF)

The EC series is a high voltage power supply developed especially for electrostatic chuck applications. Smooth wafer transmission and release is achieved through the EC's reversible output and remote/local ON/OFF function. A forced discharge function and stable HV output also enhance the operability of the E-chuck.

Main Features:

• Specially designed for E-Chuck applications
• 2 output channels
• Suitable for bi-polar systems using a single unit
• Reversible output
• Smooth wafer release through polarity reverse function
• Compact, high power

Application:

• Electrostatic Chuck (E-Chuck)

Voltage Range:  1kV to 10kV

Power:  200W