High Voltage Power Supplies -- ECA series

Electrostatic Chuck Power Supplies - Dual output, fast response, rack mount.

The ECA is a high voltage power supply developed especially for electrostatic chuck applications. Smooth wafer transmission and release is achieved through the ECA's reversible output and remote/local ON/OFF function. A forced discharge function and stable HV output also enhance the operability of the E-chuck.

Main Features:

• Specially designed for E-Chuck applications
• 2 output channels (1kV to 5kV models)
• Bi-polar output
• Built-in RF filter (option)
• Fast response with electronic polarity change (10ms)
• High reliability and long life (no relay)                                                                     Data Sheet (PDF)

Application:

• Electrostatic Chuck (E-Chuck)

Voltage Range:  1kV to 10kV

Wattage Range:  6W to 30W