High Voltage Power Supplies -- ECU series

Compact HV supply for E-chuck application                                                            Data sheet (pdf)

ECU Series is designed particularly for E-Chuck application. Smooth chuck and de-chuck is possible with output ON/OFF or polarity reverse function.

Best fit for OEM application with its ultra compact design

Designed in quite compact chassis for OEM application, and has various useful functions for E-chuck applications including forced discharge, two channel output with one control voltage, digital remote control, etc.

Main Features:

• Designed for Electro Static Chuck (E-chuck) and ,2 outputs type
• Output reversible and forced discharge function for smooth release.
• RF filter integrated
• Local,Remote or RS-232C control

Application:

• Electrostatic Chuck (E-Chuck)

Voltage Range:  ±500V to ±1.5kV

Power:  3W